Tungsten Sputtering Target
Product name:Tungsten sputtering target
Density: 99.9% of theoretical density
Specification: single weight ≤200kg / pc
|Solubility in H2O||N/A|
|Electrical Resistivity||5.65 microhm-cm @ 27°C|
|Heat of Vaporization||185 K-Cal/gm atom at 5660°C|
|Specific Heat||0.0317 Cal/g/K @ 25°C|
|Tensile Strength||750 MPa|
|Thermal Conductivity||1.73 W/cm/K @ 298.2 K|
|Thermal Expansion||(25 °C) 4.5 µm·m-1·K-1|
|Vickers Hardness||3430 MPa|
|Young's Modulus||411 GPa|
In the process of preparing tungsten sputtering targets, the component purity, density, microstructure, internal quality, welding quality, appearance quality and geometric dimensions have a significant impact on the quality of the target film. Therefore, certain production experience and technical support are needed. Our company specializes in the production of tungsten targets, and has many years of experience and customer recognition.
The sputtering target is used as a magnetron sputtering coating. The sputtering coating is a new type of physical vapor deposition (PVD) method.
Add an orthogonal magnetic field and electric field between the sputtering target (cathode) and anode, and fill the required inert gas (usually Ar gas) in the high vacuum chamber. Under the effect of the electric field, the Ar gas is ionized to positive Positive ions and electrons, a certain negative high voltage is applied to the target, the electrons emitted from the target are affected by the magnetic field and the ionization probability of the working gas is increased, and a high-density plasma is formed in the vicinity. Ar ions in the Lorentz force It accelerates to the target surface under the action, and bombards the target surface at a high speed, so that the atoms sputtered on the target accompany the momentum conversion principle and fly away from the target surface to the substrate to form a film.
|Beilstein Registry No.||N/A|
The main components of sputter coating: flat panel display, coated glass industry (mainly including architectural glass, automotive glass, optical thin film glass, etc.), thin film solar, surface engineering (decoration and tools), (magnetic, optical) recording media, microelectronics, Automotive headlights, decorative coatings, etc.